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Saturday, April 18, 2020 | History

4 edition of Industrial applications of optical inspection, metrology, and sensing found in the catalog.

Industrial applications of optical inspection, metrology, and sensing

19-20 November 1992, Boston, Massachusetts

by

  • 136 Want to read
  • 22 Currently reading

Published by SPIE in Bellingham, Wash., USA .
Written in English

    Subjects:
  • Quality control -- Optical methods -- Congresses.,
  • Optical instruments -- Industrial applications -- Congresses.,
  • Optical detectors -- Industrial applications -- Congresses.

  • Edition Notes

    Includes bibliographical references and index.

    StatementGordon M. Brown, Kevin G. Harding, H. Philip Stahl, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
    SeriesProceedings / SPIE--the International Society for Optical Engineering ;, v. 1821, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 1821.
    ContributionsBrown, Gordon M., Harding, Kevin G., Stahl, H. Philip., Society of Photo-optical Instrumentation Engineers.
    Classifications
    LC ClassificationsTS156.2 .I517 1993
    The Physical Object
    Paginationviii, 480 p. :
    Number of Pages480
    ID Numbers
    Open LibraryOL1439237M
    ISBN 100819410225
    LC Control Number93063074
    OCLC/WorldCa28451978

    Optical testing and metrology 3 Optical testing and metrology three Recent advances in industrial optical inspection: Responsibility: C.P. Grover, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering. The NWL series is the first lineup of wafer loaders for inspection microscopes capable of loading micron thin wafers. Thanks to a new chuck system, the NWL series achieves highly reliable loading suitable for inspection of next-generation semiconductors. Improved wafer-sensing functions also help prevent damage to wafers. Applications. with versatility. The modular design of our FORMLINE solutions guarantees maximum flexibility for a wide range of applications. Our product line includes compact roundness measuring devices, standard and custom CNC measuring systems for the determination of all form and positional tolerances as well as combined form and surface roughness measuring .


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Industrial applications of optical inspection, metrology, and sensing Download PDF EPUB FB2

Industrial Applications of Optical Inspection, Metrology, and Sensing Editor(s): Gordon M. Brown ; Kevin G. Harding ; H. Philip Stahl *This item is only available on the SPIE Digital Library. These books provide prompt access to the latest innovations in research and technology in their respective fields.

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Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology.

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His research work is focused on new concepts for industrial inspection and metrology by combining modern principles of optical metrology, sensor technology and image processing. Special attention is paid to the development of resolution enhanced technologies for the investigation of micro and nano : Hardcover.

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Peter is a Physics PhD specializing in applied optics. Peter has published technical papers, tutorials and book chapters in the fields of physics, optical testing, surface structure analysis, semiconductor wafer process metrology, stage motion measurement, international standards for metrology, and large-scale coordinate measurement.

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